IL Series

Our Journey Toward Excellence and Innovation

The IL series mass flow meters and controllers utilize a “thermal mass sensor” for direct mass flow measurements. The IL series has a unique design, different from other MFCs. IL controllers have an inline valve, which eliminates dead space, significantly reducing purge time. Other MFCs require a valve post mounted to the flow body, adding to the deadspace and cost. The IL series inline valve design requires no valve post, reducing parts and cost. Compact, lightweight, and economical, the IL series is perfect for OEMs who require stainless steel construction. Call 1-888-FATHOMS (328-4667) for more information and ordering.

NIST-Traceable Calibration

Steel Flow Body

0-10 SCCM Flow Range

Exceptional Features

IL Series gas mass flow controllers come with features that are exceptional among industrial products in the same classes.

Back-lit Display

Durable Steel Frame

Long Accuracy Lifetime

Inline Flow Valve

Compact Size